Silikonski dijelovi

Silicon parts are mainly used because they match the wafer material. That alone makes them useful, since it reduces the chance of introducing unwanted differences into the process. They are common in etching and deposition environments. Performance is generally stable, although lifetime can vary quite a bit depending on how harsh the process is.

With better machining and surface treatment, these parts have improved over time. Even so, they’re not always chosen for durability, but more for compatibility and process consistency.